Transient Thermoreflectance Imaging
Understanding heat flow in modern microelectronics is of significant importance in optimizing device performance and reliability. We have adapted a thermoreflectance technique to capture images of the time evolution of surface temperature distributions on microelectronic devices. Transient thermal images have been obtained with submicrosecond time resolution, millikelvin thermal resolution, and submicron spatial resolution. Transient imaging also permits non-destructive pulsed characterization of devices at high power.
Temperature cross-section from a to a’.
Caption: Submicrosecond transient thermal image sequence and resulting temperature profile cross-section for a SiGe thermionic microcooler. The sequence shows how long it takes for heat to propagate from the device’s lower layers to the top surface metal.